Tšebeliso eahafnium tetrachloride(HfCl₄) tlhahisong ea semiconductor e tsepamisitsoe haholo ho lokiseng lisebelisoa tse phahameng tsa dielectric (high-k) le lits'ebetso tsa ho beha mouoane oa lik'hemik'hale (CVD). Tse latelang ke lisebelisoa tsa eona tse khethehileng:
Ho lokisoa ha lisebelisoa tse phahameng tsa dielectric kamehla
Ka morao: Ka nts'etsopele ea theknoloji ea semiconductor, boholo ba li-transistors bo ntse bo fokotseha, 'me lesela le tloaelehileng la silicon dioxide (SiO₂) ha le khone ho finyella litlhoko tsa lisebelisoa tsa semiconductor tse phahameng ka lebaka la mathata a ho lutla. Lisebelisoa tse phahameng tsa dielectric kamehla li ka eketsa matla a matla a li-transistors, ka hona, tsa ntlafatsa ts'ebetso ea lisebelisoa.
Kopo: Hafnium tetrachloride ke selelekela sa bohlokoa bakeng sa ho lokisoa ha lisebelisoa tse phahameng tsa k (tse kang hafnium dioxide, HfO₂). Nakong ea ts'ebetso ea ho lokisa, hafnium tetrachloride e fetoloa lifilimi tsa hafnium dioxide ka lik'hemik'hale. Lifilimi tsena li na le thepa e ntle ea dielectric mme li ka sebelisoa e le likarolo tsa liheke tsa li-transistors. Mohlala, ha ho beoa li-high-k heke dielectric HfO₂ ea MOSFET (metal-oxide-semiconductor field-effect transistor), hafnium tetrachloride e ka sebelisoa e le khase ea selelekela ea hafnium.
Mokhoa oa ho beha Mouoane oa Lik'hemik'hale (CVD).
Background: Chemical vapor deposition ke tekhenoloji e tšesaane ea ho beha lifilimi e sebelisoang haholo ho etsa semiconductor, e etsang filimi e ts'oanang e tšesaane holim'a substrate ka karabelo ea lik'hemik'hale.
Kopo: Hafnium tetrachloride e sebelisoa e le selelekela ts'ebetsong ea CVD ho kenya lifilimi tsa metallic hafnium kapa hafnium compound. Lifilimi tsena li na le mefuta e sa tšoaneng ea tšebeliso ea lisebelisoa tsa semiconductor, tse kang ho etsa li-transistors tse sebetsang hantle, mohopolo, joalo-joalo. Ka mohlala, lits'ebetsong tse ling tse tsoetseng pele tsa tlhahiso ea semiconductor, hafnium tetrachloride e kenngoa holim'a liphaephe tsa silicon ka mokhoa oa CVD ho etsa lifilimi tsa boleng bo phahameng ba hafnium, tse sebelisetsoang ho ntlafatsa ts'ebetso ea motlakase ea sesebelisoa.
Bohlokoa ba Theknoloji ea Tlhoekiso
Background: Tlhahisong ea semiconductor, bohloeki ba thepa bo na le tšusumetso ea bohlokoa ts'ebetsong ea sesebelisoa. High-purity hafnium tetrachloride e ka netefatsa boleng le ts'ebetso ea filimi e behiloeng.
Kopo: E le ho finyella litlhoko tsa tlhahiso ea li-chips tse phahameng, bohloeki ba hafnium tetrachloride hangata bo hloka ho fihla ho feta 99.999%. Mohlala, Jiangsu Nanda Optoelectronic Materials Co., Ltd. e fumane patent bakeng sa ho lokisoa ha semiconductor-grade hafnium tetrachloride, e sebelisang mokhoa o phahameng oa vacuum decompression sublimation ho hloekisa hafnium tetrachloride e tiileng ho netefatsa hore bohloeki ba hafnium tetrachloride e bokelletsoeng e fihla ho feta 9999%. Hafnium tetrachloride ena e hloekileng haholo e ka fihlela litlhoko tsa theknoloji ea 14nm.
Ts'ebeliso ea hafnium tetrachloride tlhahisong ea semiconductor ha e khothalletse ntlafatso ea ts'ebetso ea sesebelisoa sa semiconductor feela, empa hape e fana ka motheo oa bohlokoa oa lisebelisoa bakeng sa nts'etsopele ea theknoloji e tsoetseng pele ea semiconductor nakong e tlang. Ka tsoelo-pele e tsoelang pele ea theknoloji ea tlhahiso ea semiconductor, litlhoko tsa bohloeki le boleng ba hafnium tetrachloride li tla phahama le ho feta, e leng ho tla ntšetsa pele nts'etsopele ea theknoloji e amanang le tlhoekiso.
| Lebitso la Sehlahiswa | Hafnium tetrachloride |
| CAS | 13499-05-3 |
| Motsoako Foromo | HfCl4 |
| Boima ba Molek'hule | 320.3 |
| Ponahalo | Phofo e tšoeu |
Ho hloeka ha hafnium tetrachloride ho ama lisebelisoa tsa semiconductor joang?
Ho hloeka ha hafnium tetrachloride (HfCl₄) e na le tšusumetso ea bohlokoa haholo ts'ebetsong le ho ts'epahala ha lisebelisoa tsa semiconductor. Ka tlhahiso ea semiconductor, high-purity hafnium tetrachloride ke e 'ngoe ea lintlha tsa bohlokoa ho netefatsa ts'ebetso ea lisebelisoa le boleng. Lintlha tse latelang ke litlamorao tse ikhethang tsa bohloeki ba hafnium tetrachloride ho lisebelisoa tsa semiconductor:
1. Tšusumetso ho boleng le ts'ebetso ea lifilimi tse tšesaane
Ho tšoana le ho teteana ha lifilimi tse tšesaane: High-purity hafnium tetrachloride e ka etsa lifilimi tse ts'oanang le tse teteaneng nakong ea ho beha mouoane oa lik'hemik'hale (CVD). Haeba hafnium tetrachloride e na le litšila, litšila tsena li ka baka likoli kapa masoba nakong ea ts'ebetso ea deposition, e leng se etsang hore ho fokotsehe ho tšoana le ho teteana ha filimi. Ka mohlala, litšila li ka baka botenya bo sa tšoaneng ba filimi, bo ama ts'ebetso ea motlakase ea sesebelisoa.
Lisebelisoa tsa dielectric tsa lifilimi tse tšesaane: Ha u lokisetsa lisebelisoa tse phahameng tsa dielectric (tse kang hafnium dioxide, HfO₂), bohloeki ba hafnium tetrachloride bo ama ka ho toba thepa ea dielectric ea filimi. High-purity hafnium tetrachloride e ka etsa bonnete ba hore filimi ea hafnium dioxide e kentsoeng e na le dielectric kamehla, ho lutla ho tlaase hona joale le thepa e ntle ea ho pata. Haeba hafnium tetrachloride e na le litšila tsa tšepe kapa litšila tse ling, e ka hlahisa maraba a eketsehileng a tefiso, ea eketsa ho lutla hona joale, le ho fokotsa thepa ea dielectric ea filimi.
2. Ho ama thepa ea motlakase ea sesebelisoa
Ho lutla ha hona joale: Ha ho hloeka ha hafnium tetrachloride e phahame, ho hloeka ha filimi e kentsoeng, 'me hona joale ho fokotseha ho fokolang. Bongata ba hona joale ba ho lutla bo ama ka kotloloho tšebeliso ea matla le ts'ebetso ea lisebelisoa tsa semiconductor. High-purity hafnium tetrachloride e ka fokotsa haholo ho lutla ha hona joale, ka hona ho ntlafatsa ts'ebetso ea matla le ts'ebetso ea sesebelisoa.
Ho senyeha ha motlakase: Ho ba teng ha litšila ho ka fokotsa motlakase oa ho senyeha ha filimi, ho etsa hore sesebelisoa se senyehe habonolo tlas'a matla a phahameng. High-purity hafnium tetrachloride e ka eketsa matla a ho senyeha ha filimi le ho ntlafatsa ho tšepahala ha sesebelisoa.
3. Ho ama ho tšepahala le bophelo ba sesebelisoa
Ho tsitsa ha mocheso: Hafnium tetrachloride e phahameng ea bohloeki e ka boloka botsitso bo botle ba mocheso sebakeng se phahameng sa mocheso, ho qoba ho senyeha ha mocheso kapa phetoho ea mekhahlelo e bakoang ke litšila. Sena se thusa ho ntlafatsa botsitso le bophelo ba sesebelisoa tlas'a maemo a phahameng a mocheso a sebetsang.
Ho tsitsa ha lik'hemik'hale: Litšila li ka 'na tsa itšoara ka lik'hemik'hale le lisebelisoa tse potolohileng, tse bakang ho fokotseha ha botsitso ba lik'hemik'hale tsa sesebelisoa. High-purity hafnium tetrachloride e ka fokotsa ho hlaha ha karabelo ea lik'hemik'hale, ka hona ho ntlafatsa ts'epo le bophelo ba sesebelisoa.
4. Tšusumetso ho tlhahiso ea tlhahiso ea sesebelisoa
Fokotsa mefokolo: High-purity hafnium tetrachloride e ka fokotsa bofokoli ts'ebetsong ea deposition le ho ntlafatsa boleng ba filimi. Sena se thusa ho ntlafatsa tlhahiso ea tlhahiso ea lisebelisoa tsa semiconductor le ho fokotsa litšenyehelo tsa tlhahiso.
Ntlafatsa ho tsitsisa: High-purity hafnium tetrachloride e ka netefatsa hore lihlopha tse fapaneng tsa lifilimi li na le ts'ebetso e ts'oanang, e leng bohlokoa bakeng sa tlhahiso e kholo ea lisebelisoa tsa semiconductor.
5. Tšusumetso ho mekhoa e tsoetseng pele
Kopana le litlhoko tsa lits'ebetso tse tsoetseng pele: Ha lits'ebetso tsa tlhahiso ea semiconductor li ntse li tsoela pele ho hola ho isa lits'ebetsong tse nyane, litlhoko tsa bohloeki tsa thepa le tsona li ntse li phahama le ho feta. Mohlala, lisebelisoa tsa semiconductor tse nang le ts'ebetso ea 14nm le ka tlase hangata li hloka bohloeki ba hafnium tetrachloride e fetang 99.999%. High-purity hafnium tetrachloride e ka finyella litlhoko tse tiileng tsa lisebelisoa tsa mekhoa ena e tsoetseng pele le ho netefatsa ts'ebetso ea lisebelisoa ho latela ts'ebetso e phahameng, tšebeliso e tlaase ea matla le botšepehi bo phahameng.
Khothalletsa tsoelo-pele ea theknoloji: High-purity hafnium tetrachloride e ke ke ea finyella litlhoko tsa morao-rao tsa tlhahiso ea semiconductor, empa hape e fana ka motheo oa bohlokoa oa thepa bakeng sa nts'etsopele ea theknoloji e tsoetseng pele ea semiconductor nakong e tlang.
Ho hloeka ha hafnium tetrachloride ho na le phello ea bohlokoa ts'ebetsong, ho tšepahala le bophelo ba lisebelisoa tsa semiconductor. Bohloeki bo phahameng ba hafnium tetrachloride bo ka netefatsa boleng le ts'ebetso ea filimi, ho fokotsa ho tsuba hona joale, ho eketsa matla a ho senya, ho matlafatsa botsitso ba mocheso le botsitso ba lik'hemik'hale, kahoo ho ntlafatsa ts'ebetso ea kakaretso le ho tšepahala ha lisebelisoa tsa semiconductor. Ka tsoelo-pele e tsoelang pele ea theknoloji ea tlhahiso ea semiconductor, litlhoko tsa bohloeki ba hafnium tetrachloride li tla phahama le ho feta, tse tla ntšetsa pele nts'etsopele ea mahlale a amanang le tlhoekiso.
Nako ea poso: Apr-22-2025